Resolution Enhancement Techniques In Optical Lithography Spie Tutorial Texts In Optical Engineering Vol Tt47 Pdf Gratuit

    Télécharger Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) et lire le Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) livres en ligne au format PDF. Également obtenir des livres avec la catégorie Books,Engineering & Transportation,Engineering au format EPUB et Mobi. Découvrez d'autres livres traduits en Anglais, en Espagnol.


    Description des Livres :

    This tutorial summarizes optical lithography enhancement research and development over the past 20 years. Discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers.Contents - Foreword - Preface - List of symbols - Introduction - Optical imaging and resolution - Modified illumination - Optical proximity correction - Alternating phase-shifting mask - Attenuated phase-shift mask - Selecting appropriate RETs - Second-generation RETs - Concluding remarks - k1 conversion charts - Bibliography - Inde


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